扫描探针显微术（SPM ）是一种高分辨显微学方法，它通过一个探针在样品表面的扫描来获取表面微观结构的信息。利用SPM 方法不仅可以直接观测到实空间中的原子排列还可以得到关于样品表面的很多其它信息。 SPM 方法有很多分支，其中最常用也最重要的是扫描隧道显微术（STM）和扫描力显微术（SFM ）。STM技术基于电子隧穿现象，在扫描过程中通过监控隧穿电流的大小来进行样品表面的探测，而SFM 技术所利用的是探针与样品表面之间的相互作用力。相应地，SPM 方法的理论模型有多种，用以解释用实验仪器所得到的结果。只有通过理论模型的解释，实验结果所揭示的表面属性才能被人们所认知。理论、实验与模拟计算三者相互结合的趋势越加明显。 四探针STM 是目前STM 技术应用和发展的新方向之一，它是利用超高真空扫描电子显微术（UHV-SEM）和STM中的成熟技术发展起来的，在原理上与传统STM 相同，但因其四探针的协同工作，使得它在样品表面输运特性测量中拥有很大：的优势。 本文详细论述了搭建中的四探针STM 设备：介绍整个系统的总体结构、各个组成部分的功能作用、实现这些功能的内部元件、各元件的性能参数、系统所能提供的测量工作环境、可以执行的测量任务等等，本文还将给出从实际操作中获得的四探针针尖的SEM图像和HOPC 的STM扫描图像，给出这些图像的参数值和含义。最后，将对四探针STM 的研究领域进行简单展望。

Scanning probe microscopy ( SPM ) is a high-resolution microscopy , which utilizing a scanning microprobe above the sample to acquire the information on the microstructure of the sample surface . With SPM , it is not only possible to obtain the atomic-resolution real space image , but also to obtain other information about the surface properties . SPM has many kinds of specific branches . The most popular and important ones among them are scanning tunneling microscopy ( STM ) and scanning force microscopy ( SFM ) . STM , which is based on the electron tunneling phenomenon , mainly monitors the tunneling current during scanning , while SFM uses the tip-surface interaction . SPM has many theoretical models to interpret the experimental results . Only with theoretical modeling , the physical otigin of the image from experiment and the surface properties which the image reveals can be fully understood . The trend of the combination of theory , experiment and simulation now becomes more and more obvious in the study of the inicroscopic world . 4-Probe STM 15 a new direction of development and application of STM , which is based on ultra-high-vacuum scanning electron microscopy and well-developed STM technologies . It has the same principle as the traditional one . But due to the incorporated operation of the four probes , it has many advantages in the measurement of surface transport properties . In this paper , we will give a brief introduction on the 4-probe STM system under current construction . Details will be given on the configuration of the system , the function of each part , the components that realize these functions , the performance parameters of each component , the environments that the system can provide for the observation and the possible kinds of measurements ．we will also show SEM images of the four probe tips and some STM images of HOPG which are obtained from actual experimental operation . we will give the related parameters and the meaning of the image . Finally , we will make a simple outlook for the possible applications of the 4-probe STM .