近年来，全球变暖、海平面上升已经成为不争的事实。其中化石能源燃烧导致的高碳 排放无疑是造成气候变化的最主要原因之一，而为了解决传统能源造成的环境气候难题， 人们开始通过科学技术进行清洁能源的开发利用。太阳能作为地球最主要的能量来源，其 优异的可再生性和清洁性得到了人们的广泛关注。尤其近年来气候变化带来的频繁极端天 气灾难更是让人类迫切的需要让太阳能等清洁能源代替化石能源。而光伏发电作为利用太 阳能最重要的方式之一，如何高效地利用太阳能产生电能是目前需要进一步解决的难题。 在光伏发电中，晶硅电池凭借其成本低廉、效率较高等优点占据着绝大部分的市场份额。 所以如何继续提高晶硅电池的光能利用率从而降低度电成本在科学研究中显得尤为重要。

本文主要通过新型制绒技术在高效晶硅太阳能电池中的应用展开研究： 第一，研究了氢氟酸溶液中铜催化硅各向异性腐蚀硅方法，提出控制氢氟酸和氯化铜

腐蚀溶液成分，在单晶硅表面实现倒金字塔和正金字塔结构的调控制备。该方法主要利用 含 CuCl2 的 HF 混合水溶液作为腐蚀液，室温（300K）条件下对硅进行腐蚀，可以制备表 面光滑、分布均匀的倒金字塔阵列结构，获得最佳反射率仅为 6.7%。通过对反应体系的研 究，本文认为 HF 的浓度影响硅表面结构，HF 浓度越大，硅表面越呈现倒金字塔结构，原 因是氢离子的增加，使得原本反应体系中一价铜离子的氧化性增强，进而导致其氧化还原 电位向硅的价带移动，该反应可以直接向硅价带注入空穴，揭示了单晶硅在氢氟酸溶液中 产生倒金字塔结构是各向异性腐蚀与空穴注入的协同作用。

第二，提出了添加剂调控氢氟酸各向异性腐蚀单晶硅制备倒金字塔结构制备技术。围 绕金属催化湿法刻蚀的各向异性腐蚀相关机理和应用，创造性地使用铜离子和极微量的添 加剂配合氢氟酸溶液在硅片上实现了快速且高效的倒金字塔制绒工艺。这种倒金字塔制绒 工艺在光伏电池生产线上得到了验证，所制备的单晶硅 5 主栅电池片具有较好的表现，其 开路电压、短路电流、填充因子和电池效率分别达到 0.65 V，9.14 A， 82.43 和 19.95％。 各项指标相比于同批次正金字塔绒面结构电池更好。同时对准单晶硅片进行了倒金字塔绒 面及电池制备。

第三，首次提出了添加剂调控碱溶液各向异性腐蚀在单晶硅表面制备倒金字塔结构的 方法。受到传统单晶硅碱刻蚀工艺的启发，通过加入不同种类的添加剂使得在碱刻蚀中得 到的正金字塔结构形貌转变为吸光性更好的倒金字塔结构。该方法主要利用氢氧化钠

（NaOH）或氢氧化钾（KOH）等碱性溶液对硅晶体的各向异性腐蚀作用，通过在溶液中 添加微量添加剂，使得硅表面在腐蚀过程中表面自发形成抗腐蚀掩膜，进而获得倒金字塔 绒面结构，下一步将推进产线实验。

In recent years, global warming and rising sea levels have become indisputable facts. Among them, the high carbon emissions caused by the burning of fossil energy is undoubtedly one of the main reasons for climate change. In order to solve the environmental and climate problems caused by traditional energy, people have begun to develop and utilize clean energy through science and technology. As the most important energy source of the earth, solar energy has attracted widespread attention for its excellent renewability and cleanliness. In particular, the frequent extreme weather disasters brought about by climate change in recent years have made mankind an urgent need to replace fossil energy with clean energy such as solar energy. Photovoltaic power generation is one of the most important ways to use solar energy. How to efficiently use solar energy to generate electricity is a problem that needs to be further solved. In photovoltaic power generation, crystalline silicon cells account for most of the market share due to their low cost and high efficiency. Therefore, how to continue to improve the utilization rate of light energy of crystalline silicon cells to reduce the cost of electricity is particularly important in scientific research.

This article mainly conducts research on the application of new texturing technology in high- efficiency crystalline silicon solar cells:

First, to invent a wet etching method using hydrofluoric acid solution to prepare an inverted pyramid array structure, which realizes the anisotropic corrosion of silicon in the hydrofluoric acid solution. This method mainly uses CuCl2 containing HF mixed aqueous solution as an etching solution to etch silicon at room temperature (300K), and can prepare an inverted pyramid array structure with a smooth surface and a uniform distribution, and the best reflectance is only 6.7 %. Through the research of the reaction system, this article believes that the concentration of HF affects the surface structure of silicon. The higher the HF concentration, the more the silicon surface presents an inverted pyramid structure. The reason is that the increase of hydrogen ions increases the oxidation of the monovalent copper ions in the original reaction system, which in turn causes its redox potential to move to the valence band of silicon. This reaction can directly inject holes into the silicon valence band, revealing that the inverted pyramid structure of monocrystalline silicon in the hydrofluoric acid solution is anisotropic corrosion and hole injection.

The second is to focus on the anisotropic corrosion related mechanisms and traditional applications of metal-catalyzed wet etching, creatively using low-cost metal copper ions and very small amounts of additives combined with acid solutions to achieve rapid and efficient surface preparation on silicon wafers. The velvet process improves the utilization rate of light energy of the crystalline silicon cell and improves the efficiency of the solar cell.

The third is inspired by the traditional alkali etching process of single crystal silicon, the morphology of the positive pyramid structure obtained in the alkali etching is transformed into an inverted pyramid structure with better light absorption by adding different kinds of additives. This method mainly uses the anisotropic corrosion effect of alkaline solutions such as sodium hydroxide (NaOH) or potassium hydroxide (KOH) on silicon crystals, and adds a small amount of substances to the solution to make the etched silicon wafer appear inverted pyramids structure, the next step will be to advance the production line experiment.